Abstract： In order to solve the problem of the decline in the quality of the polysilicon products caused by the high content of carbon in the Siemens process, the influence of raw material components and composition on the quality of products was investigated by controlling the contents of carbon in the carbon-containing organic trichlorosilane and the methane in hydrogen into the polycrystalline silicon reduction furnace. The carbon content in the polysilicon was characterized by Fourier infrared spectrometer (FT-IR), gas chromatography-mass spectrum(GC-MS), and gas chromatography(GC). The results showed that the content of methane in hydrogen had a higher impact on the polysilicon products than that of the organic carbon in chlorosilanes. In the actual production, the original process was improved by installing a methane removal apparatus before the silicon reduction furnace to maintain the methane content in hydrogen at about 5.0×10-5.
Cai Yanguo,Wei Dongliang,Zhu Yongqiang et al. Effects of Carbon Content on Quality of Polysilicon Products and Treatment Process[J]. 化学反应工程与工艺, 2016, 32(4): 373-377.
