Abstract：Improving the yield of trichlorosilane in cold hydrogenation process is an urgent technical problem for polysilicon production and silicone industry. The use of catalyst is considered to be an important measure to improve the yield of trichlorosilane in this technology when the operating parameters such as temperature and pressure are basically optimized. CuCl was selected as catalyst in this experiment after repeatedly comparing and investigating the use of copper based catalyst, nickel based catalyst and nickel copper catalyst in other enterprises. Through the comparison experiment in two sets of production units of the same configuration with and without catalyst it was verified that cuprous chloride catalyst improved the yield of trichlorosilane in the cold hydrogenation process. The yield of trichlorosilane was increased from 24% to about 30% by using cuprous chloride catalyst in the reactor.
BI Mingfeng. Effect of CuCl on the Yield of Trichlorosilane in the Cold Hydrogenation Process of Polysilicon Production[J]. 化学反应工程与工艺, 2019, 35(6): 524-528.
