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| 2017, Vol. 33(3): 284-288 DOI: | ||
| Impurity Control of Trichlorosilane after Hydrogen Reduction | ||
| 1. Kunming Yeyan New-Material Company Limited, Qujing 655000, China; 2. Key Lab of Yunnan Province Optoelectronic Silicon Materials Preparation Technology Enterprises, Qujing 655000, China |
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| Received 2017-01-19 Revised 2017-03-14 | ||
| Supporting info | ||
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