Abstract In order to control the content of impurity in trichlorosilane after reduction, simulation calculations of trichlorosilane purification tower was carried out by Aspen Plus simulation software. The effects of the feed, back flow and recovery amount on the boron and phosphorus impurities in the trichlorosilane were investigated. The control measures of carbon and metal impurities in trichlorosilane after reduction were explored in the practical production. The results showed that the content of boron and phosphorus impurities in trichlorosilane can be reduced effectively after reduction of trichlorosilane by reducing the feed amount, improving the recovery and back flow rate in the purifying tower. Effectively control of the impurity content of carbon and metal after hydrogen reduction in trichlorosilane can also be made by reasonable maintenance and selection of reduction furnace bell jar, base plate and spare parts.
